PAD STRUCTURE OF LIQUID CRYSTAL DISPLAY DEVICE AND FABRICATION METHOD OF PAD OF LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To prevent corrosion of a pad bottom electrode and to prevent disconnection in a pad electrode terminal in contact with the pad bottom electrode by controlling the metal layer thickness of the pad bottom electrode and forming a contact hole with a gradual slope in the pad.;SOLUTION: The pad structure includes: a pad bottom electrode 410 formed with a predetermined area at one edge side of each of signal lines formed on an array substrate; an insulation layer 420 formed over the pad bottom electrode; a contact hole 440 for exposing the bottom electrode 410, the contact hole formed as a predetermined portion of the insulation layer 420; and a pad terminal electrode 450 formed over the contact hole 440 and to be connected with the pad bottom electrode 410, wherein the pad bottom electrode 410 is formed in a dual structure including an aluminum alloy layer and a molybdenum layer, with the thickness of the molybdenum layer greater than at least a quarter of the thickness of the aluminum alloy layer formed beneath the molybdenum layer.;COPYRIGHT: (C)2006,JPO&NCIPI