STAGE DEVICE, GANTRY-TYPE STAGE DEVICE, AND METHOD OF CONTROLLING STAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a stage device which can correct the parallelism of a beam to a table.;SOLUTION: The stage device 10 is called as a gantry-type stage device which moves a substrate 11 as a workpiece in the horizontal direction, and has a base 12, the table 14 arranged on the base 12 in a manner movable in a Y direction, a portal gantry section 16 fixed onto the base 12, and a control device 17 for controlling movement of the table 14 in the Y direction and height adjustment of the gantry section 16 in a Z direction. The gantry section 16 has a beam 18 horizontally erected over the table 14, and a pair of Z-axis driving mechanisms 20 supporting both ends of the beam 18. The beam 18 is provided with a pair of Z-directional sensors 21A, 21B for measuring distances between the table 14 and the beam 18. Thus by driving the Z-axis driving mechanisms 20 such that values measured by the Z-directional sensors 21A, 21B are equal to each other, the beam 18 is set in parallel with an upper surface of the table 14.;COPYRIGHT: (C)2006,JPO&NCIPI