SILENT DISCHARGE-TYPE OZONATOR TUBE AND SILENT DISCHARGE-TYPE OZONATOR EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide an ozonator tube having an ozone generating electrode capable of stabilizing and maintaining the concentration of generated ozone and shortening the time in which the concentration of generated ozone varies and an ozonator equipped with the ozonator tube; and also an ozonator capable of shortening preparative operation time when it is built in treating processes such as a sterilization, a decoloration, or a deodorization process.;SOLUTION: In the ozonator provided with the ozonator tube which comprises a cylindrical earthed electrode with both ends opened and a cylindrical high potential electrode arranged inside the earthed electrode via a gap and has a dielectric layer on the electrode surface of either the earthed electrode or the high potential electrode, and a case which has the ozonator tube therein, and which produces ozone by discharge in a raw material gas containing oxygen; the surface of an electrode which has no dielectric layer mentioned above is covered by a metal oxide layer having a thickness of 0.1 μm or larger.;COPYRIGHT: (C)2006,JPO&NCIPI