CLEANING APPARATUS OF LIQUID CRYSTAL PANEL, AND CLEANING METHOD OF LIQUID CRYSTAL PANEL

摘要

PROBLEM TO BE SOLVED: To provide a cleaning apparatus and a cleaning method by which cleaning treatment of a liquid crystal panel can be easily performed for a short time with satisfactory reliability.;SOLUTION: In the cleaning apparatus of the liquid crystal panel, the liquid crystal panel 61 formed by sticking a pair of substrates to each other by using a sealing material and encapsulating a liquid crystal between the substrates is cleaned. The cleaning apparatus has a treatment chamber 2 housing the liquid crystal panel 61, a panel holder 5 provided in the treatment chamber 2 and holding the liquid crystal panel 61 at a plurality of spot-shaped regions, a heating device 3 heating the inner part of the treatment chamber 2 and a vacuum pump 8 reducing pressure in the inner part of the treatment chamber 2. The heating device 3 and the vacuum pump 8 set the inner part of the treatment chamber 2 to be the temperature and the pressure at which the liquid crystal is volatilized. The liquid crystal panel 61 is preferably a strip-shaped panel. The needless liquid crystal in the liquid crystal panel 61 is volatilized in the inner part of the treatment chamber 2 to be removed from the liquid crystal panel 61.;COPYRIGHT: (C)2006,JPO&NCIPI