ULTRASONIC FLAW DETECTION METHOD AND EQUIPMENT FOR DETECTING FLAW OF FUNCTIONAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic flaw detection method capable of detecting a flaw of a thin plate-shaped specimen in a shorter time by using fewer probes.;SOLUTION: This ultrasonic flaw detection method for detecting a flaw of a specimen 13 is characterized as follows: The thin plate-shaped specimen 13 having end faces 13a, 13b is held in liquid, and an ultrasonic wave is projected to the end faces 13a, 13b by fixed probes 15, 17, and a reflected wave from the specimen 13 is received as a received wave. Then, waveform data of the received wave are compared with reference waveform data, to thereby determine existence of a flaw of the specimen 13.;COPYRIGHT: (C)2006,JPO&NCIPI