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LENGTH-MEASURING LASER INTERFEROMETER

机译:测长激光干涉仪

摘要

PROBLEM TO BE SOLVED: To provide an easily-handleable length-measuring laser interferometer having a simple constitution.;SOLUTION: This length-measuring laser interferometer is equipped with a laser light source; an interference unit 11 having a beam splitter 7 for splitting a laser beam into the first and second laser beams 18, 19 directed to the first and second retroreflection means 14, 16 and synthesizing the first and second laser beams retroreflected and returned in the reverse direction so as to interfere with each other, and a casing for storing the beam splitter; and a light receiving means for receiving interference light of the first and second laser beams and generating an electric signal corresponding to an interference fringe. The casing is equipped with at least two reference faces having different face directions. The interference unit 11 is equipped with the first and second beam direction adjustment means 12, 13 for adjusting the emission directions of the first and second laser beams, and the emission directions of the first and second laser beams are adjusted in the prescribed directions.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:要解决的问题:提供一种结构简单的易于操作的测长激光干涉仪;解决方案:该测长激光干涉仪配备有激光光源。干涉单元11具有分束器7,该分束器用于将激光束分成指向第一和第二回射装置14、16的第一和第二激光束18、19,并合成反向反射和返回的第一和第二激光束。彼此干涉,以及用于存储分束器的壳体;光接收装置,用于接收第一和第二激光束的干涉光并产生与干涉条纹相对应的电信号。壳体配备有至少两个具有不同面方向的参考面。干涉单元11配备有用于调节第一和第二激光束的发射方向的第一和第二光束方向调节装置12、13,并且在预定方向上调节第一和第二激光束的发射方向。版权所有(C)2006,JPO&NCIPI

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