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METHOD FOR FORMING THIN FILM OF AMORPHOUS TITANIUM OXIDE, AND PHOTOCATALYTIC COMPOSITE THIN FILM
METHOD FOR FORMING THIN FILM OF AMORPHOUS TITANIUM OXIDE, AND PHOTOCATALYTIC COMPOSITE THIN FILM
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机译:非晶态二氧化钛薄膜的形成方法及光催化复合薄膜
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摘要
PROBLEM TO BE SOLVED: To provide a method for forming a thin film of amorphous titanium oxide having excellent photocatalytic performance.;SOLUTION: The method for forming the thin film of amorphous titanium oxide having the photocatalytic performance includes forming the titanium oxide film on a substrate, while irradiating the substrate or a vapor flow of evaporated titanium oxide, with an ion beam.;COPYRIGHT: (C)2006,JPO&NCIPI
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