PRESSURE SENSOR AND WATER LEVEL GAUGE OF PRESSURE TYPE

摘要

PROBLEM TO BE SOLVED: To provide a water level gauge of immersion type hardly breaking and long life capable of correctly measuring the pressure of the measurement fluid without being affected by the fluid or being scaled.;SOLUTION: A pressure introducing member 31 is provided with a pressure introducing through hole 31c, and a pressure receiving surface 32a of a sensor chip 32 provided with a strain gauge is fixed so as to block the end face of the pressure introducing hole 31c. A circular disk type diaphragm 33 provided with a coaxial corrugation is fixed on the pressure introducing hole 31c so as to separate it. Silicone oil 34 is filled up into the pressure introducing hole 31c hermetically sealed by the diaphragm 33 and the pressure receiving surface 32a of the sensor chip 32. Silicone gel 35 is made to fill up the tip part of the pressure introducing hole 31c from the diaphragm 33 and the storage recess 12d of the cylindrical case 12. The pressure impressed on the silicone gel 35 from the measurement fluid is transferred from the diaphragm 33 to the sensor tip 32 via the silicone oil 34.;COPYRIGHT: (C)2006,JPO&NCIPI