METHOD FOR PATTERNING SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE, AND SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE

摘要

PPROBLEM TO BE SOLVED: To provide a method for patterning, which is adaptable to problems associated with productivity and quality in arranging protrusions for controlling an alignment direction and columnar or rib shaped spacers defining liquid crystal layer thickness in a liquid crystal display. PSOLUTION: A negative type photosensitive material, whose residual film thickness is varied by changing light quantity, is used as the photosensitive material and is exposed to light with a laser direct drawing method by varying the light quantity, or a negative type photosensitive material, whose residual film thickness is varied by changing a wavelength of light, is used as the photosensitive material and is exposed to light with the laser direct drawing method by varying the wavelength of light, and subsequently is pattern formed via a developing process. PCOPYRIGHT: (C)2006,JPO&NCIPI