FUNCTIONAL DEVICE, PROBE AND SCANNING PROBE MICROSCOPY HAVING PROBE, AND MANUFACTURING METHOD OF FUNCTIONAL DEVICE AND PROBE

摘要

PROBLEM TO BE SOLVED: To form a narrower slit than a conventional one by a focused ion beam process (FIB) and to suppress change of quality at a beam irradiation part, without using a mask pattern or the like.;SOLUTION: The manufacturing method comprises a step of forming a thin film 102 on a main face of substrate 101 and a step of forming a slit 104 penetrated from the backside of substrate 101 to the surface of thin film 102, by irradiation of FIB 103 from the backside of substrate 101. Thus, an effect of flare due to FIB 103 can be suppressed.;COPYRIGHT: (C)2006,JPO&NCIPI