Parameter dependence measurement method of local potential barrier height

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring the height of a local potential barrier by equipment for detecting or controlling a tunnel current under conditions where an influence given to a measurement value by measurement conditions is made clear.;SOLUTION: A processing for determining the presence or absence of a change in local potential barrier height accompanying a change in a bias voltage V and the tunnel current I by making distance (s) between a probe and a sample constant (1), and a processing for determining the presence or absence of a change in the local potential barrier height accompanied by a change in (s) by making I or V constant after processing in (1) (2) are performed. Further, when the local potential barrier height is changed by the processing in (1), and the local potential barrier height is changed by the processing in (2), a processing for determining the presence or absence of a change in the local potential barrier height accompanied by a change in (s) by making V or I that was not made constant in the processing in (2) constant is performed (3).;COPYRIGHT: (C)2004,JPO&NCIPI