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METHOD OF DETERMINING LIQUID DROPLET FORMING CONDITION, METHOD OF MEASURING LIQUID DROPLET VOLUME, MEASURING METHOD OF NUMBER OF PARTICLES, AND LIQUID DROPLET FORMING APPARATUS
METHOD OF DETERMINING LIQUID DROPLET FORMING CONDITION, METHOD OF MEASURING LIQUID DROPLET VOLUME, MEASURING METHOD OF NUMBER OF PARTICLES, AND LIQUID DROPLET FORMING APPARATUS
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机译:液体滴形成条件的测定方法,液体滴量的测定方法,颗粒数的测定方法以及液体滴形成装置
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摘要
PROBLEM TO BE SOLVED: To provide a method of determining liquid droplet forming condition capable of easily optimizing the application conditions of the voltage applied across the liquid in a nozzle and a substrate in the formation of liquid droplets using electrostatic force, and also provide a liquid droplet forming apparatus, capable of suitably performing method of determining forming condition of liquid droplets.;SOLUTION: The determining method of condition liquid droplet forming comprises a waveform-measuring step S1, wherein pulse voltage P is applied across the sample liquid 21 stored in the nozzle 3 and a substrate 5 arranged facing the leading end of the nozzle 3 to discharge the sample liquid 21 from the leading end of the nozzle 3, to form liquid droplets 27 comprising the sample liquid 21 on the substrate 5 and the time waveform of the current I flowing across the sample liquid 21 in the nozzle 3 and the substrate 5 is measured; and an application condition determining step S2 for determining the application condition of pulse voltage P, when the liquid droplets 27 are formed on the substrate 5 on the basis of the time waveform of the current I.;COPYRIGHT: (C)2006,JPO&NCIPI
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