REFLECTION CHARACTERISTICS MEASURING APPARATUS AND MULTI-ANGLE COLORIMETER

摘要

PROBLEM TO BE SOLVED: To monitor light that is as approximate as possible to the illumination light that is actually illuminating a sample surface, by constituting a reference system without using optical fibers or the like.;SOLUTION: A measurement area 1a and a reference area 3a are arranged in the vicinity of each other, and an illumination light is collectively irradiated to them. Sample luminous flux 1c and reference luminous flux 3c, reflected light from the measurement area 1a and the reference area 3a, are each converged to a slit 35a for samples and a slit 35b for reference arranged in parallel with each other via an objective lens 31 and made incident onto an image forming lens 36 and a diffraction grating 37 (dispersing element). Since a field lens 34 (intermediate lens) is arranged, at this time, all the sample luminous flux 1c and the reference luminous flux 3c are made incident to the image forming lens 36 and the diffraction grating 37 to contribute to the formation of dispersed images of an array 38a for samples and an array 38b for reference. It is thus possible to measure the spectral characteristics of the sample luminous flux 1c and the reference luminous flux 3c by using a common light-receiving system.;COPYRIGHT: (C)2006,JPO&NCIPI