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SAMPLE CHARACTERISTIC MEASURING DEVICE AND MEASURING METHOD BY LIGHT SCATTERING
SAMPLE CHARACTERISTIC MEASURING DEVICE AND MEASURING METHOD BY LIGHT SCATTERING
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机译:光散射样品特征量测装置及量测方法
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摘要
PROBLEM TO BE SOLVED: To provide a sample characteristic measuring device having an enlarged range of an applicable particle size and improved measuring accuracy, and capable of performing accurate and detailed particle discrimination by acquiring wide information on a particle property and collating from many viewpoints.;SOLUTION: This device for evaluating the sample characteristic by irradiating the sample with light and measuring scattered light from the sample is equipped with a pair or a plurality of pairs of spectrooptical systems 14 for using light including a plurality of wavelength components generated from irradiation light source parts 1, 2, especially linearly polarized light, as incident light and spectrally developing the scattered light from the sample in the direction orthogonal to an optical axis following the wavelength by angle dispersion, condensing optical systems 15, and light receiving elements 17 for measuring light intensity relative to each wavelength of the angle-dispersed scattered light.;COPYRIGHT: (C)2006,JPO&NCIPI
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