PLASMA GENERATOR, PLASMA TREATMENT DEVICE AND PLASMA TREATMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a plasma generator capable of always providing high plasma generation efficiency without depending on the electron density of plasma, and to provide a plasma treatment device and a plasma treatment method.;SOLUTION: This plasma generator is provided with a plasma generation vessel 10 having a space for generating plasma P and a waveguide body 54 constituting at least a part of the wall surface of the plasma generation vessel 10 for introducing microwaves M from the outside of the plasma generation vessel 10 to the inside thereof; and is so structured as to be able to generate plasma P in the plasma generation vessel 10 by the microwaves M introduced through the waveguide body 54. The waveguide body 54 is characterized by having, between the plasma P and itself, a transition region 54T where its effective dielectric constant is generally continuously lowered toward the plasma P.;COPYRIGHT: (C)2006,JPO&NCIPI