DETECTION METHOD OF REGISTRATION ACCURACY

摘要

PROBLEM TO BE SOLVED: To measure with high accuracy the amount of disagreement, between the displacement amount of registration measured from superposition measurement marks and the displacement amount of registration of circuit patterns themselves of the semiconductor device, in the manufacturing process of a semiconductor device.;SOLUTION: A circuit pattern sensitive to changes in the electrical resistance is used for misregistration displacement to estimate the displacement amount of registration of circuit patterns of a semiconductor device, from the tendency in the change of the resistance, and this is compared with the measured amount of the superposition measurement marks to investigate with high accuracy the amount of disagreement between both patterns.;COPYRIGHT: (C)2006,JPO&NCIPI