The absolute measuring method and equipment implementing geometric or optical structure of an optical element

摘要

PROBLEM TO BE SOLVED: To absolutely measure the geometric or optical structure of an optical element, for example, a lens or a die for manufacturing such a lens.;SOLUTION: After an optical element 4 is irradiated with incident light with a known wave front and a map of the wave front slopes of the light, after reflected from the optical element concerned or transmitted through the optical element is measured on a given surface by means of a measuring device 2, the geometrical or optical structure of the optical element concerned can be derived, by applying computational procedure, using a computing means 3 from the map of measured slopes. The computational means for determining the characteristic value of the surface of the analyzed optical element from the shape of map of its principal curvature, computes the derivatives in a plurality of directions for the map of slopes of the wave front of the light, after being reflected from the optical element concerned or transmitted through the optical element concerned, computes the curvature of wave front of the light from the derivatives, computes the map of principal curvature of the surface of the optical element from the curvature, and thus can acquire the wave front of light incident into the optical element.;COPYRIGHT: (C)2006,JPO&NCIPI