GAS RECOVERY VESSEL, RECOVERING METHOD OF NOBLE GAS USING GAS RECOVERY VESSEL, GAS RECOVERY EQUIPMENT TO GAS RECOVERY VESSEL AND GAS WITHDRAWAL FROM GAS RECOVERY VESSEL

摘要

PPROBLEM TO BE SOLVED: To provide a method for recovering a noble gas using a gas recovery vessel comprises recovering an exhausted gas containing krypton and xenon used as an atmospheric gas for a semiconductor product manufacturing apparatus and the like to efficiently separate and purify kripton and xenon from the exhausted gas. PSOLUTION: The recovering method for a noble gas using a gas recovery vessel comprises removing toxic components to reduce the adsorption ability of activated carbon to adsorb the noble gas in advance and then charging the noble gas-containing exhaust gas under pressure after conducting the toxic components removal treatment into the gas recovery vessel having the activated carbon to adsorb the noble gas built-in at the inner part of the sealed vessel with a joint connectable to the gas recovery piping through the on-off valve when the noble gas-containing exhaust gas discharged from the equipment to use the noble gas is recovered. The noble gas to be adsorbed to the activated carbon is detached by reducing the pressure in the gas recovery vessel and withdrawing the detached noble gas from the gas recovery vessel to introduce to the noble gas separation and purification equipment. PCOPYRIGHT: (C)2006,JPO&NCIPI