EXTRACTION METHOD OF ROUGHNESS CURVE, AND EXTRACTION METHOD OF THREE-DIMENSIONAL SURFACE ROUGHNESS SHAPE

摘要

PROBLEM TO BE SOLVED: To reduce the number of times of operations, to shorten a processing time, and to remove an end effect, in a process for extracting a roughness curve or the roughness shape of a three-dimensional display from a sectional curve.;SOLUTION: Down sampling of data of the sectional curve is performed with a thin-out rate D to acquire thin-out data of the sectional curve, and a Gaussian filter having a cut-off wavelength λ'_c=λ_c/D is applied to the thin-out data to extract long wavelength components over the cut-off wavelength λ'_c, and the long wavelength components over the cut-off wavelength λ'_c are subtracted from the sectional curve, to thereby acquire the roughness curve.;COPYRIGHT: (C)2006,JPO&NCIPI