Photo sensivitilizer and the photosensitive constituent which includes this and the photo sensivitilizer which is displayed with

摘要

PROBLEM TO BE SOLVED: To provide a water-soluble photosensitive agent not necessary for using an organic solvent at the time of coating and good in storage stability and good enough in resolution. ;SOLUTION: This photosensitive composition contains the photosensitive agent represented by the formula and a pattern is formed by using this composition. In the formula, R₁ is a divalent bonding group; each of R₂ and R₃ is an alkyl, aryl, or aralkyl or each of R₁ and R₂, R₂ and R₃ may combine with each other to form an N-containing hetero ring; R₄ is an alkyl or aralkyl; and X^- is an anion.;COPYRIGHT: (C)1997,JPO