Total reflection X-ray fluorescence spectrometry and the device

摘要

PROBLEM TO BE SOLVED: To provide a new total reflection X-ray fluorescence analysis method and a device for it capable of achieving an ultramicroanalysis with excellent energy resolution and detection efficiency.;SOLUTION: Spectroscopy of fluorescent X-rays emitted from a sample in a total reflection condition or its periphery is carried out by means of a curved crystal 1.;COPYRIGHT: (C)2004,JPO