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By the fact that the organicity thin film where the burble possible resin constituent on the substrate it forms a membrane in pattern of specification production manner

机译:通过这样的事实,即有机薄膜在基材上可能是易碎的树脂成分的情况下,按照规范生产方式形成膜

摘要

PROBLEM TO BE SOLVED: To easily manufacture a patterned organic thin film by forming a separable specific resin composition as a patterned film on a base board, and forming the organic thin film of a specific thickness on the whole base board surface and separating the film of a resin composition formed as a patterned film to form an organic thin film pattern. ;SOLUTION: One or more kinds selected from a group composed of resin of synthetic rubber, vinyl chloride, epoxy and urethane or a group composed of a component of silicon, fluorine, and phosphoric ester, are desirably contained as a separable resin composition. An organic thin film formed over the whole surface of a base board is formed in a thickness of 1 μm to 1 nm. When separating the separable resin composition after forming this film, there is an optimal range in peeling strength for the base board. This range is desirably set to 5 to 500 g/10 mm.;COPYRIGHT: (C)1999,JPO
机译:解决的问题:通过在基板上形成可分离的特定树脂组合物作为图案膜,然后在整个基板表面上形成特定厚度的有机薄膜并将膜分离,从而容易地制造图案化有机薄膜。树脂组合物,其形成为图案化膜以形成有机薄膜图案。 ;解决方案:作为可分离的树脂组合物,期望包含选自合成橡胶,氯乙烯,环氧树脂和氨基甲酸酯的树脂中的一种或多种,​​或包含硅,氟和磷酸酯的成分的组中的一种或多种。在基板的整个表面上形成的有机薄膜以1μm至1nm的厚度形成。在形成该膜之后分离可分离的树脂组合物时,对于基板的剥离强度存在最佳范围。该范围理想地设置为5至500 g / 10 mm .;版权:(C)1999,JPO

著录项

  • 公开/公告号JP3757613B2

    专利类型

  • 公开/公告日2006-03-22

    原文格式PDF

  • 申请/专利权人 住友化学株式会社;

    申请/专利号JP19980106219

  • 发明设计人 桑原 一;谷 猛;大西 敏博;

    申请日1998-04-16

  • 分类号H05B33/10;C09K11/06;H01L51/50;C08L101/00;

  • 国家 JP

  • 入库时间 2022-08-21 21:50:08

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