Being the secondary electron emission device which discharges the secondary electron to truth

摘要

PROBLEM TO BE SOLVED: To provide a secondary electron discharge device, for which secondary electron discharging efficiency is improved with good reproducibility, and to provide an electron gun using the device. SOLUTION: A support substrate 1 of a secondary electron discharge device 100 is made of Si or the like, and a polycrystalline diamond film 2 is formed thereon by microwave plasma CVD. At this stage, the polycrystalline diamond film 2 is doped with the impure material, so as to form a p-type conductive film. A surface of the polycrystalline diamond film 2 is hydrogen-terminated for forming a hydrogen terminal layer 3, and an active layer 4 of CsO is formed on the hydrogen terminal layer 3 for lowering the work function by alternately supplying Cs and O2 each other in vacuum.