Being production manner of the orientation Characteristic ZnO piezoelectric

摘要

PURPOSE: To provide an orientated ZnO based piezoelectric material improved in insulation resistance and dielectric loss factor and particularly worthy when used as a vibrator or a filter. ;CONSTITUTION: At least one kind selected from an element species group of Ca, Mg, Ni and Cu is incorporated in the structure of an oriented ZnO. And at least one kind of the element species (Ca, Mg, Ni and Cu) is incorporated in the composition of the orientated ZnO by thermal diffusion method.;COPYRIGHT: (C)1996,JPO