A light wavefront measuring apparatus (2, 2a, 42) includes a separating element (7a, 47a) for separating a flux of light which exits from an optical head (1, 31) into a first beam and a second beam, a first interference fringe display section (21, 21a) for displaying interference fringes formed from the first beam, a Dove prism (13, 53) for rotating a wavefront of the second beam around its optical axis (AX2), and a second interference fringe display section (22, 22a) for displaying interference fringes formed from the second beam which passed through it. In adjustment of the light source device, position of a collimator (5) in the optical head (1, 31) is adjusted in optical axis direction so as to approximate the interference fringe patterns displayed in the interference fringe display sections (21, 22, 21a, 22a) each other.
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机译:光波前测量设备( 2,2 B> a I> ,42 B>)包括一个分离元件( 7 B> a I> ,47 B> a I>)用于将从光学头( 1、31 B>)出射的光通量分离到第一光束和第二光束,用于显示由第一光束形成的干涉条纹的第一干涉条纹显示部分( 21,21 B> a I>),道威棱镜( 13 ,53 B>)和第二干涉条纹显示部分( 22、22 B> <)围绕第二光束的光轴(AX 2 Sub>)旋转I> a I>),用于显示由穿过它的第二个光束形成的干涉条纹。在调整光源装置时,沿光轴方向调整准直器( 5 B>)在光头( 1、31 B>)中的位置,以便近似干涉干涉条纹显示部分中显示的条纹图案( 21、22、21 B> a I> ,22 B> a I>) 。
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