ACTUATOR FOR TILTING REFLECTING MIRROR OF DIGITAL MICROMIRROR DEVICE FOR DIGITAL LIGHT PROCESSING TYPE PROJECTION

摘要

A reflecting mirror tilting actuator comprises a base having an inner space defined therein, a mirror holder having a fixing part fixed to the base and a horizontal part integrally connected with the fixing part by a resilient connection part, the mirror holder being provided with at least one resilient member for resiliently supporting the reflecting mirror upward, a mirror supporting unit having a cover attached to the horizontal part and a mirror stopper disposed between the horizontal part and the cover, a tilting unit having an actuating member whose upper end comes into contact with the horizontal part and a tilting stopper whose upper end comes into contact with the horizontal part, and a horizontal adjusting unit having at least one adjustment screw, whose lower end contacts the mirror stopper through at least one adjustment hole formed at the cover, for adjusting flatness of the reflecting mirror.