Method of patterning a thick-film paste material layer, method of manufacturing cold- cathode field electron emission device, and method of manufacturing a cold-cathode field electrin emission display

摘要

In a method of manufacturing a cold cathode field emission device, a cathode electrode 11, an insulating layer 12 and a gate electrode 13 are formed; an opening portion 14 is formed through the gate electrode 13 and the insulating layer 12 to expose the cathode electrode 11; a resist-material layer 20 covering the side wall of the opening portion 14, the gate electrode 13 and the insulating layer 12 is formed; the surface of the resist-material layer is modified to form a modified layer 21; an electron emitting portion constituted of the thick-film-paste-material layer 22 is formed on the cathode electrode 11 positioned in the bottom portion of the opening portion 14; and then, the resist-material layer 20 is removed.