SEMICONDUCTOR APPARATUS CAPABLE OF REDUCING OUTGASSING POLLUTION AND METHOD OF ACHIEVING THE SAME

摘要

A semiconductor apparatus includes a reaction chamber, a vacuum cassette elevator having an exhaust, a door, an air-extracting device and a control device. Controlled by the controlled devices, the air-extracting device coupled to the exhaust can extract from the vacuum cassette elevator gas formed by residual reaction gas on the wafer reacting with the air in the vacuum cassette elevator.