A PDMS valve-less micro pump structure includes a PDMS body having a contour surface, a membrane covering the contour surface of the PDMS body, and a PZT actuator located on the membrane. The contour surface of the PDMS body to be sealed by the membrane and the PZT actuator has in series a lead-in cavity, a lead-in nozzle structure, a main cavity, a lead-out nozzle structure, and a lead-out cavity. The PZT actuator is located right above the main cavity. By providing the PDMS as a material to form the body of the micro pump, the micro pump can then be mass-produced with less cost and simpler structuring. Also, substantial elasticity and bio-compatibility for the micro pump can be achieved.
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