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Method of reducing insertion loss in a transition region between a plurality of input or output waveguides to a free space coupler region

机译:减少在多个输入或输出波导到自由空间耦合器区域之间的过渡区域中的插入损耗的方法

摘要

A method for reducing insertion loss in a transition region between a plurality of input or output waveguides to a free space coupler region in a photonic integrated circuit (PIC) includes the steps of forming a passivation layer over the waveguides and region and forming the passivation overlayer such that it monotonically increases in thickness through the transition region to the free space coupler region.
机译:一种用于减小光子集成电路(PIC)中的多个输入或输出波导到自由空间耦合器区域之间的过渡区域中的插入损耗的方法,包括在波导和区域上方形成钝化层并形成钝化覆盖层的步骤。因此,它在过渡区域到自由空间耦合器区域的厚度单调增加。

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