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Pattern extracting system, method for extracting measuring points, method for extracting patterns, and computer program product for extracting patterns
Pattern extracting system, method for extracting measuring points, method for extracting patterns, and computer program product for extracting patterns
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机译:图案提取系统,测量点的提取方法,图案的提取方法以及图案的计算机程序产品
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摘要
A pattern extracting system includes a sampler configured to sample test candidate patterns from a circuit pattern, based on a lithographic process tolerance, a space classification module configured to classify the test candidate patterns into space distance groups depending on a space distance to an adjacent pattern, a density classification module configured to classify the test candidate patterns into pattern density groups depending on a surrounding pattern density, and an assessment module configured to assess actual measurements of dimensional errors of the test candidate patterns classified into the space distance groups and the pattern density groups.
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