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Electrically floating diagnostic plasma probe with ion property sensors
Electrically floating diagnostic plasma probe with ion property sensors
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机译:带离子特性传感器的电悬浮诊断等离子体探头
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摘要
A diagnostic plasma probe comprises ion sensors for measuring kinetic properties of plasma ions. Ion sensors of the invention include sensors for measuring differential ion flux, ion energy distributions, and ion incidence angle distributions at or near the surface of the probe. The measurement probe is electrically floating so as to cause minimal disruption of the properties of the processing plasma when disposed into a processing environment. A floating electrical bias is applied to the sensors to obtain measurements of ion properties.
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