Nanogripper device having length measuring function and method for lenghth measurement executed with nanogripper device having length measuring function

摘要

A fixed electrode and a movable electrode used to drive each arm are disposed at a drive unit. As a voltage is applied between the fixed electrode and the movable the electrode, a coulomb force causes the movable the electrode to move, thereby driving the arms along the closing direction. The dimensions of a sample can be measured based upon the electrostatic capacity achieved between the electrodes when the sample becomes gripped by the arms.