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PINNED PHOTODIODE SENSOR WITH GATE-CONTROLLED SILICON-CONTROLLED RECTIFIER TRANSFER SWITCH AND METHOD OF FORMATION

机译:栅极控制的硅控制整流器转换开关的固定式光电二极管传感器及其形成方法

摘要

A pinned photodiode sensor with gate-controlled SCR switch includes a pinned photodiode and a gate-controlled SCR switch. The SCR switch includes a P-type substrate, an N− doped region, and an N+ doped region formed on the substrate; a P+ doped region formed on the N− doped region; an oxide layer formed on the P substrate, the N− doped region, the N+ doped region, and the P+ doped region; and a gate formed above the P substrate and the N− doped region. The gate includes a P+ doped region and an N+ doped region. During an exposure procedure, a depletion region will not reach the interface between the oxide layer and the substrate, thereby preventing dark current leakage.
机译:具有栅极控制SCR开关的固定光电二极管传感器包括固定光电二极管和栅极控制SCR开关。 SCR开关包括P型基板,形成在基板上的N-掺杂区和N +掺杂区。在N-掺杂区上形成的P +掺杂区;在P衬底,N-掺杂区,N +掺杂区和P +掺杂区上形成氧化物层;栅极形成在P衬底和N-掺杂区上方。栅极包括P +掺杂区和N +掺杂区。在曝光过程中,耗尽区将不会到达氧化物层和衬底之间的界面,从而防止暗电流泄漏。

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