Method and apparatus for maintaining accurate positioning between a probe and a DUT

摘要

A method and apparatus for keeping a probe accurately positioned relative to a device to be tested. The apparatus having a probe and movable probe station element for positioning the probe at a predetermined test position on the device to be tested. The probe station element being driven by a drive to position the probe at the test position, and having a controller connected thereto for substantially keeping the probe at the test position and inhibiting the probe shifting therefrom. In one form the controller is capable of determining the variance between the current probe position and the desired or predetermined test position, and actuating the drive after the variance has reached a predetermined value.