Method for increasing the work function of ITO film under an excimer laser exposure treatment

摘要

The present invention relates to a method for increasing the work function of the indium-tin-oxide (ITO) film under an excimer laser exposure treatment. The range of the excimer laser energy is between tens and hundreds mJ/cm², the frequency range is between zero and one hundred Hz, and exposure time is between five minutes to tens hours. It, therefore, can increase the work function of the indium-tin-oxide (ITO) film.