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Low optical overlap mode (LOOM) waveguiding system and method of making same

机译:低光重叠模式(LOOM)波导系统及其制造方法

摘要

An optical system including: a substrate having a recess; and, a substantially planar, semiconductor waveguiding membrane suspended over the recess and having a thickness less than about 200 nm; wherein, the optical system supports a propagating optical mode having a majority of its energy external to the semiconductor waveguiding membrane.
机译:一种光学系统,包括:具有凹部的基板;和基本上平坦的半导体波导膜,悬在凹槽上,厚度小于约200nm;其中,光学系统支持具有大部分能量在半导体波导膜外部的传播光学模式。

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