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Database interpolation method for optical measurement of diffractive microstructures
Database interpolation method for optical measurement of diffractive microstructures
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机译:衍射微结构光学测量的数据库插值方法
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摘要
A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.
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