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Design mechanism for semiconductor fab-wide data warehouse application
Design mechanism for semiconductor fab-wide data warehouse application
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机译:半导体晶圆厂数据仓库应用的设计机制
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摘要
A method and system for collecting, storing and accessing semiconductor manufacturing data in a storage entity are provided. The semiconductor manufacturing data is collected from at least one process tool and stored in a first predefined area of the storage entity until the data storing in the first predefined area is complete, at which time additional semiconductor manufacturing data may be stored in a second predefined area of the storage entity. After the storing of data in the first predefined area is complete, it may be accessed.
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