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Method and apparatus for dispatching based on metrology tool performance
Method and apparatus for dispatching based on metrology tool performance
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机译:基于计量工具性能的调度方法及装置
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摘要
A method for dispatching based on metrology tool performance includes determining a precision metric associated with each of a plurality of metrology tools. A metrology request including context information is generated. A precision requirement for the metrology request is identified based on the context information. A set of the metrology tools capable of satisfying the metrology request is identified based on the precision requirement and the precision metrics. A manufacturing system includes a manufacturing execution system server and a metrology monitor. The manufacturing execution system server is configured to generate a metrology request including context information. The metrology monitor is configured to determine a precision metric associated with each of a plurality of metrology tools, identify a precision requirement for the metrology request based on the context information, and identify a set of the metrology tools capable of satisfying the metrology request based on the precision requirement and the precision metrics.
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