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Optical device having dual microstrip transmission lines with a low-k material and a method of manufacture thereof
Optical device having dual microstrip transmission lines with a low-k material and a method of manufacture thereof
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机译:具有具有低k材料的双微带传输线的光学装置及其制造方法
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摘要
The present invention provides an optical device. In one embodiment, the optical device includes an optical waveguide formed in or over a ridge located on a substrate. The optical device also includes a microstrip transmission line comprising a signal electrode and a ground electrode adjacent the ridge and a low-k dielectric material separating the signal and ground electrodes. The present invention also provides a method for making the optical device.
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