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Radiation-sensitive composition changing in refractive index and method of changing refractive index
Radiation-sensitive composition changing in refractive index and method of changing refractive index
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机译:改变折射率的辐射敏感组合物和改变折射率的方法
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摘要
A radiation sensitive refractive index changing composition comprising (A) a decomposable compound, (B) a non-decomposable compound having a higher refractive index than the decomposable compound (A), (C) a radiation sensitive decomposer and (D) a stabilizer. By exposing this composition to radiation through a pattern mask, the above components (C) and (A) of an exposed portion decompose to create a refractive index difference between the exposed portion and an unexposed portion, thereby forming a pattern having different refractive indices.
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