MAGNETIC FIELD GENERATION DEVICE, ELECTROMAGNETIC ACTUATOR, STAGE DEVICE, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

There are provided a magnetic field generation device and others having a group of permanent magnets arranged with alternating magnetic poles and capable of improving a magnetic flux density and obtaining a high magnetic field. In the magnetic field generation device (20), permanent magnets are arranged with different poles to oppose to each other for generating a magnetic field in a predetermined space (K). The magnetic field generation device (20) has a plurality of magnetic circuits (L1, L2) for generating magnetic fields superimposed on each other. The magnetic field generation device (20) has a first permanent magnet unit (30) for forming the first magnetic circuit (L1) and a second permanent magnet unit (40) for forming the second magnetic circuit (L2) outside the first magnetic circuit (L1) with respect to the predetermined space (K).