LARGE-SIZE OLED MANUFACTURING APPARATUS USING INK- JET PRINTING TECHNIQUES AND LOW MOLECULE THERMAL DEPOSITION TECHNIQUES

摘要

An in-line OLED manufacturing apparatus, in which chambers used to manufacture OLEDs are connected in a line so that the OLEDs are manufactured under the condition that substrates moves linearly. In the in-line OLED manufacturing apparatus, a plurality of carrier chambers and a plurality of buffer chambers are alternately disposed in a line, a loading chamber and an unloading chamber are respectively disposed at the carrier chambers of both ends of the line, and process chambers for performing steps of a process for manufacturing OLED substrates are disposed at the respective carrier chambers.