ELECTROSTATIC MICROSWITCH FOR LOW-VOLTAGE-ACTUATION COMPONENTS

摘要

The invention relates to an electrostatic microswitch which is intended to connect two strip conductors (4, 5) which are disposed on a support. According to the invention, the two strip conductors are connected by means of a contact pad (6) which is provided on deformable means (3) which are made from an insulating material and which can be deformed in relation to the support under the effect of an electrostatic force generated by control electrodes. The aforementioned contact pad connects the ends (14, 15) of the two strip conductors (4, 5) when the deformable means are sufficiently deformed. Moreover, the control electrodes are distributed over the deformable means and the support in two electrode assemblies, namely: (i) a first assembly of electrodes (101, 102, 33, 53) which is intended to generate a first electrostatic force in order to initiate the deformation of the deformable means, and (ii) a second assembly of electrodes (101, 102, 7, 8) which is intended to generate a second electrostatic force in order to continue the deformation of the deformable means (3), such that the contact pad (6) connects the ends (14, 15) of the two strip conductors.