METHOD OF MANUFACTURING VACUUM PLASMA TREATED WORKPIECES AND SYSTEM FOR VACUUM PLASMA TREATING WORKPIECES

摘要

For manufacturing a vacuum plasma treated workpiece, a workpiece to be treated is introduced into vacuum chamber (1). In the vacuum chamber (1) there is thereby established a plasma discharge at the first frequency (f1) which is at least in the Hf-frequency range. After removing the now treated workpiece from the vacuum chamber (1), the latter is cleaned, thereby establishing now a plasma discharge at a second frequency (f2) which is higher than the addressed first frequency (f1).