METHOD OF FABRICATING TUNGSTEN-TELLURITE GLASS THIN FILM AND WIDE-BAND PLANNAR AMPLIFIER HAVING THE TUNGSTEN-TELLURITE GLASS THIN FILM

摘要

The present invention in particular, relates to a broadband tungsten plate-amplifier relates to telru broadband amplifier having a plate-like glass thin film light-telru method for producing a glass thin film, and tungsten light.; The present invention provides a method for producing a tellurium oxide (Tellurium (VI) oxide) and tungsten oxide (Tungsten (VI) oxide) by using a solid-phase sintering method, a tungsten light telru (TeO ₂ -WO ₃₎ of the target; The step of washing the base material; Characterized in that it comprises a step of forming a thin film light telru - by RF sputtering in the deposition chamber for the target material to deposit on the tongue suspending the base material.