AUTOMATIC SKIPPING LOT PROCESS SYSTEM IN MANUFACTURING SEMICONDUCTOR AND METHOD USING THE SAME

摘要

1. the art that the invention defined in the claims; The present invention will on a computer-readable recording medium storing a lot process proceeds omitted system and method in a semiconductor manufacturing step, a program for realizing them.; 2. The invention attempts to solve the technical challenges; The present invention, by using the integrated automation system for a semiconductor line managed by the plurality of servers the operator to perform the process proceeds not request that contains the process data in the lot, and a distributed database to process data, and the process proceeds not request of the lot recording medium by check and update, the computer-readable recording the progress lot process in a semiconductor manufacturing process that can be omitted, the process proceeds in the lot without further operator action omitted system and method and a program for realizing them in the Do we want to provide.; 3. Resolution of the subject matter of the invention,; The present invention, a first step of a lot process proceeds skip request from the outside is received operator interface process; A second step of the process, the operator interface and the operator interface server receiving the lot process proceeds not requested; A third step of the operator interface server checks and updates the requested data not proceed a lot process received from the master database, and transmitting the data relating to the lot step not make progress in the cell management server; From the operator interface server data related to the above cell management server is not in progress the lot process receives data relating to the progress lot process omit the data concerning confirmation and update, the lot process proceeds not from the master database to the lot scheduled server a fourth step of transmitting; A fifth step of the cell management server transmits the data confirmation results relating to the lot process proceeds not from the master database to the operator interface server; A sixth step in which the cell management server and recording the data relating to the lot progress step is omitted in the history information file server queue, sending a result message to the server history information; And by the cell management server lot process recorded data relating to the progress not the history information server queue file, the history information server receives a message from the acquired data associated with the process not proceeding of the lot from the history information server queue file and it performs the seventh step to determine and update in the historical database.; 4. An important use of the invention,; The present invention is used to fight method not in progress the process of the lot in the semiconductor manufacturing process.