PRESSURE SENSOR, PRESSURE CONTROLLER AND TEMPERATURE DRIFT CORRECTOR OF PRESSURE TYPE FLOW CONTROLLER

摘要

The present invention developed a pressure sensor, a pressure control device and a flow rate control apparatus that can automatically compensate for the temperature drift of the pressure sensor to detect accurately the pressure, regardless of temperature variations.; To this end, the temperature drift compensation device of the pressure type flow rate control apparatus of the present invention and installing the orifice 4 and the control valve 22, upstream pressure sensor 10 for detecting the upstream pressure (P ₁₎ between , in the upstream pressure (P ₁₎ pressure type flow rate control device for controlling the flow rate through the orifice (4) by opening and closing of the control valve 22 while computing the flow rate through the orifice 4 by the fluid and a temperature sensor 14 for measuring the temperature, fluid temperature (T) and the memory in the memory means 64 for storing the relationship between the output drift of the upstream pressure sensor 10, when the fluid temperature (T) change is configured to output the drift amount of the means 64 upstream from the pressure sensor 10 from the data of the ondeu drift correction means for correcting the temperature drift distilled cattle. And automatically correcting the temperature drift of the pressure sensor by this configuration allows for accurate flow control.