CANTILEVER HAVING PIEZOELECTRIC ACTUATOR AND TIP WITH HIGH ASPECT RATIO AND METHOD FOR MANUFACTURING THE SAME

摘要

the invention the high aspect ratio probe having a cantilever piezoelectric actuator and a method of manufacturing the same as in the related, more particularly the upper surface of the probe support flat rectangular shape, to a middle portion and a probe cantilever piezoelectric actuator and a method of manufacturing the probe having a high aspect ratio that is composed of a carbon nanotube probe peak by electron beam welding by electron beam induced deposition. ; The above object of the present invention with an electron beam induced deposition in step, the probe support to form a two-axis piezoelectric actuator for driving the load portion of the silicon nitride film to form a cantilever having a probe support portion of the rectangular shape, the cantilever is achieved by a method for manufacturing a piezoelectric actuator cantilever probe having a high aspect ratio, characterized in that to attach the step of forming a probe in the probe medium, and a carbon nanotube intermediate portion comprises the step of forming a probe-peak. ; Thus, by electron beam welding cantilever piezoelectric actuator and a method of manufacturing the probe having a high aspect ratio of the present invention is to increase the reproducibility of the probe medium formed by the electron beam induced deposition unit to form a probe support portion of the top surface flat rectangular shape is attached and the carbon nanotubes to control the angle sikimeuroseo easy to reduce the distortion of the measurement by the two-axis piezoelectric actuator drive as well as more precise and reliable measurement enables the effect.